Model Development for Atomic Force Microscope Stage Mechanisms
نویسندگان
چکیده
منابع مشابه
Model Development for Atomic Force Microscope Stage Mechanisms
In this paper, we develop nonlinear constitutive equations and resulting system models quantifying the nonlinear and hysteretic field-displacement relations inherent to lead zirconate titanate (PZT) devices employed in atomic force microscope stage mechanisms. We focus specifically on PZT rods utilizing d33 motion and PZT shells driven in d31 regimes, but the modeling framework is sufficiently ...
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ژورنال
عنوان ژورنال: SIAM Journal on Applied Mathematics
سال: 2006
ISSN: 0036-1399,1095-712X
DOI: 10.1137/05063307x